Nur O., Willander M. Low Temperature Chemical Nanofabrication: Recent Progress, Challenges and Emerging Technologies

William Andrew, 2020. — 253 p. — (Micro and Nano Technologies). — ISBN: 978-0-12-813345-3.This book offers a thorough and theoretical background to nanoscale fabrication phenomena, also covering important practical applications. It covers the conventional top down and the newly emerging bottom up processing methods. The latter has proven to be feasible for obtaining device quality material and can either be performed using high or low temperature processing. Low temperature (?100 oC), in particular, is becoming increasingly used due to its simplicity and varied applications, with huge benefits for developing new devices and flexible non-conventional substrates.This important resource is ideal for researchers seeking to learn more about the fundamental theories related to nanoscale phenomena and nanofabrication.True PDF