Hellborg R., Whitlow H.J., Zhang Y. (Eds.) Ion Beams in Nanoscience and Technology

Springer-Verlag Berlinm, Heidelberg, 2009. – 468 p. – ISBN: 978-3-642-00622-7Energetic ion beam irradiation is the basis of a wide plethora of powerful research- and fabrication-techniques for materials characterisation and processing on a nanometre scale. Materials with tailored optical, magnetic and electrical properties can be fabricated by synthesis of nanocrystals by ion implantation, focused ion beams can be used to machine away and deposit material on a scale of nanometres and the scattering of energetic ions is a unique and quantitative tool for process development in high speed electronics and 3-D nanostructures with extreme aspect radios for tissue engineering and nano-fluidics lab-on-a-chip may be machined using proton beams. This book will benefit practitioners, researchers and graduate students working in the field of ion beams and application and more generally everyone concerned with the broad field of nanoscience and technology.Trends in Nanoscience and Technology
Nanoscale Engineering in the Biosciences
High Speed Electronics
Surface Modification Using Reactive Landing of Mass-Selected Ions
Basic Ion-Matter Interactions in Nanometre Scale Materials
Basics of Ion Scattering in Nanoscale Materials
Stopping of Ions in Nanomaterials
Sputtering
Ion Ranges
Computer Simulation Methods for Defect Configurations and Nanoscale Structures
Characterizing Nanoscale Crystal Perfection by Crystal Mapping
Interatomic Potential
Ion Beam Characterisation of Nanoscale Materials
Medium Energy Ion Scattering for Near Surface Structure and Depth Profiling
Surface Crystallography Terminology
Thin Film Characterisation Using MeV Ion Beams
Nanoscale Materials Defect Characterisation
Nanoscale Defects
Diagnostic Ion Beam Luminescence
Nanomaterials Science with Radioactive Ion Beams
Nanoscale Materials Processing with Ion Beams
Nanocluster and Nanovoid Formation by Ion Implantation
Plasma Etching and Integration with Nanoprocessing
Focused Ion Beam Machining and Deposition
Sample Preparation for Transmission Electron Microscopy Using a Focused Ion Beam
Integrated Circuit Chip Modification Using Focused Ion Beams Proton Beam Writing: A New 3D Nanolithographic Technique
Proton Beam Writing of Optical Structures
Tissue Engineering and Bioscience Methods Using Proton Beam Writing
Stamps for Nanoimprint Lithography
Silicon Micro/Nano-Fabrication Using Proton Beam Writing and Electrochemical Etching
Nanoscale Materials Modification for Device Applications
Luminescence, Ion Implantation, and Nanoparticles
Micro- and Nanoengineering with Ion Tracks
Equipment and Practice
Ion Accelerators for Nanoscience
Focusing keV and MeV Ion Beams
Ion Spectrometers and Detectors
Electronics for Application of Ion Beams in Nanoscience
Appendix A: SI Units and Other Units
Appendix B: Selection of Methods