Hesketh P.J. (Ed.) BioNanoFluidic MEMS

Springer, 2008. — 300 p.BioNanoFluidic MEMS explains nanofabrication and nanomaterials synthesis suitable for the development of biosensors. The fundamentals initiate an awareness for engineers and scientists who would like to develop and implement novel biosensors for various applications. In addition, the material covered includes:
- BioNanoFluidic MEMS connection between the interdisciplinary nature of BioNanoFluidics and MEMS
- BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies
- Hands-on steps for implementation of biosensor fabrication including a discussion of the clean room lithography process and etching, microsensor systems lamination, PDMS moulding, parylene deposition, and others
- Interconnection between the interdisciplinary nature of BioNanoFluidics and MEMS
BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies
- Discussion of fabrication processes for implementation of biosensor and nanochemical sensors including the clean room lithography process, etching, chemical vapor deposition, electroplating, microsensor systems lamination, PDMS moulding, parylene deposition, and others
- Selected coverage of Nano/Microfabrication, Nano Manufacturing and Nano/Micro IntegrationNanoelectronics: Retrospect and Prospect.
Synthesis of oxide nanostructures
Nanolithography
Nano/Microfabrication methods for sensors and NEMS/MEMS
Micro and nanomanufacturing via molding
Temperature measurement of microdevices using thermoreflectance and raman thermometry
Stereolithography and rapid prototyping
Engineered nanopores
Engineering biomaterial interfaces through micro and nano-patterning
Biosensors micro and nano integration.